Nano-structuring of silicon and porous silicon by photo-etching using near field optics, Diesinger, H., Bsiesy, A., Herino, R., 197, 561 (2003)
Nano-structuring of silicon and porous silicon by photo-etching using near field optics, Diesinger, H., Bsiesy, A., Herino, R., 197, 561 (2003)
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